Metafile is consists of NTFS metadata, which is part of part of the system cache . NTFS metadata includes the MFT as well as the other various NTFS metadata files .In the MFT each file attribute record takes 1k and each file has at least one attribute record. Add to this the other NTFS metadata files and you can see why the Metafile category can grow quite large on servers with lots of files.
More about different types of files which consume the physical memory on Windows Server:http://blogs.technet.com/b/askperf/archive/2010/08/13/introduction-to-the-new-sysinternals-tool-rammap.aspx
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